On-Chip: Direct Microrolling Processing on a Silicon Wafer...

Small 2017 / 09 Vol. 13; Iss. 36

On-Chip: Direct Microrolling Processing on a Silicon Wafer (Small 36/2017)

Aoki, Kanna, Ishiguro, Keita, Denokami, Masaki, Tanahashi, Yuya, Furusawa, Kentaro, Sekine, Norihiko, Adschiri, Tadafumi, Fujii, Minoru
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Volume:
13
Journal:
Small
DOI:
10.1002/smll.201770195
Date:
September, 2017
File:
PDF, 3.15 MB
2017
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