Novel design of microgyroscopes employing electrostatic actuation and resistance-change based sensing
Ghommem, M., Abdelkefi, A.Volume:
411
Language:
english
Journal:
Journal of Sound and Vibration
DOI:
10.1016/j.jsv.2017.09.010
Date:
December, 2017
File:
PDF, 828 KB
english, 2017