Deflection behavior of a piezo-driven flexible actuator for vacuum micropumps
Liu, Jihao, Guan, Enguang, Li, Peixing, Wang, Fujun, Liang, Cunman, Zhao, YanzhengLanguage:
english
Journal:
Sensors and Actuators A: Physical
DOI:
10.1016/j.sna.2017.09.029
Date:
September, 2017
File:
PDF, 1.77 MB
english, 2017