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Investigation of thickness uniformity of thin metal films by using α-particle energy loss method and successive scanning measurements
Li, Gang, Xu, Jiayun, Bai, LixinVolume:
12
Language:
english
Journal:
Journal of Instrumentation
DOI:
10.1088/1748-0221/12/03/T03001
Date:
March, 2017
File:
PDF, 2.48 MB
english, 2017