In-Depth Profiles of Oxide Films on GaAs Studied by XPS

Japanese Journal of Applied Physics 1978 / 01 Vol. 17; Iss. S1

In-Depth Profiles of Oxide Films on GaAs Studied by XPS

Mizokawa, Yusuke, Iwasaki, Hiroshi, Nishitani, Ryusuke, Nakamura, Shogo
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Volume:
17
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAPS.17S1.327
Date:
January, 1978
File:
PDF, 955 KB
1978
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