Gas Inlet and Input Power Modulated Sputtering Molybdenum...

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Surface and Coatings Technology 2017 / 9

Gas Inlet and Input Power Modulated Sputtering Molybdenum Nitride Thin Films

Xiang, Jian-Ying, Wu, Fan-Bean
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Language:
english
Journal:
Surface and Coatings Technology
DOI:
10.1016/j.surfcoat.2017.06.095
Date:
September, 2017
File:
PDF, 1003 KB
english, 2017
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