Formation and characterization of high-performance silicon...

Formation and characterization of high-performance silicon thin-film transistors with and without location-controlled grain boundary

Liao, Chan-Yu, Lin, Hsiao-Chun, Wang, Chao-Lung, Lee, I-Che, Chou, Chia-Hsin, Li, Yu-Ren, Cheng, Huang-Chung
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Volume:
27
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/1361-6439/aa849e
Date:
October, 2017
File:
PDF, 4.29 MB
english, 2017
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