Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2017 / 11 Vol. 35; Iss. 6
![](/img/cover-not-exists.png)
Comparison of air and heptane solvent annealing of block copolymers for bit-patterned media
Owen, Allen G., Su, Hao, Montgomery, Angelique, Gupta, SubhadraVolume:
35
Language:
english
Journal:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
DOI:
10.1116/1.5004150
Date:
November, 2017
File:
PDF, 3.08 MB
english, 2017