Comparison of air and heptane solvent annealing of block...

Comparison of air and heptane solvent annealing of block copolymers for bit-patterned media

Owen, Allen G., Su, Hao, Montgomery, Angelique, Gupta, Subhadra
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Volume:
35
Language:
english
Journal:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
DOI:
10.1116/1.5004150
Date:
November, 2017
File:
PDF, 3.08 MB
english, 2017
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