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Hot Wire ALD: Hot-Wire Assisted ALD: A Study Powered by In Situ Spectroscopic Ellipsometry (Adv. Mater. Interfaces 18/2017)
Kovalgin, Alexey Y., Yang, Mengdi, Banerjee, Sourish, Apaydin, Ramazan O., Aarnink, Antonius A. I., Kinge, Sachin, Wolters, Rob A. M.Volume:
4
Journal:
Advanced Materials Interfaces
DOI:
10.1002/admi.201770095
Date:
September, 2017
File:
PDF, 2.44 MB
2017