Dynamics and vibrations of particle-sensing MEMS...

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Microsystem Technologies 2017 / 9

Dynamics and vibrations of particle-sensing MEMS considering thermal and electrostatic actuation

Siahpour, Shahin, Zand, Mahdi Moghimi, Mousavi, Mohammad
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Language:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-017-3554-y
Date:
September, 2017
File:
PDF, 1.81 MB
english, 2017
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