Trace Metals Optimization in Ceria Abrasive for Material...

Trace Metals Optimization in Ceria Abrasive for Material Removal Rate Enhancement during ILD CMP

Shin, Cheolmin, Choi, Jinhak, Kim, Hojoong, Kulkarni, Atul, Kwak, Donggeon, Kim, Eungchul, Kim, Taesung
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Volume:
6
Year:
2017
Language:
english
Journal:
ECS Journal of Solid State Science and Technology
DOI:
10.1149/2.0241709jss
File:
PDF, 588 KB
english, 2017
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