Mechanical properties of boron nitride thin films prepared by atomic layer deposition
Weber, Matthieu, Coy, Emerson, Iatsunskyi, Igor, Yate, Luis, Miele, Philippe, Bechelany, MikhaelYear:
2017
Language:
english
Journal:
CrystEngComm
DOI:
10.1039/C7CE01357D
File:
PDF, 1.29 MB
english, 2017