Thermal MEMS actuator operation in aqueous media/seawater:...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2015 / 01 Vol. 33; Iss. 1

Thermal MEMS actuator operation in aqueous media/seawater: Performance enhancement through atomic layer deposition post processing of PolyMUMPs devices

Warnat, Stephan, Forbrigger, Cameron, Hubbard, Ted, Bertuch, Adam, Sundaram, Ganesh
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Volume:
33
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4902081
Date:
January, 2015
File:
PDF, 1.36 MB
english, 2015
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