Elementary Screw and Mixed-Type Dislocations in 4H-SiC Characterized by X-Ray Topography Taken with Six Equivalent 11-28 g-Vectors and a Comparison to Etch Pit Evaluation
Yao, Yong Zhao, Ishikawa, Yukari, Sugawara, Yoshihiro, Takahashi, Yumiko, Hirano, KeiichiVolume:
897
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.897.185
Date:
May, 2017
File:
PDF, 875 KB
english, 2017