Radio frequency magnetron sputter deposited ZnO films doped...

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Materials Research Innovations 2017 / 08

Radio frequency magnetron sputter deposited ZnO films doped with Al, Ga and Ti

Chan, Kah-Yoong, Low, Cheng-Yang, Au, Benedict Wen-Cheun, Ng, Zi-Neng, Yeoh, Mian-En, Pang, Wai-Leong, Lee, Chu-Liang, Wong, Sew-Kin
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Language:
english
Journal:
Materials Research Innovations
DOI:
10.1080/14328917.2017.1356013
Date:
August, 2017
File:
PDF, 1.67 MB
english, 2017
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