Depth-Resolved Carrier Lifetime Measurements in 4H-SiC Epilayers Monitoring Carbon Vacancy Elimination
Galeckas, Augustinas, Ayedh, Hussein M., Bergman, J. Peder, Svensson, Bengt GunnarVolume:
897
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.897.258
Date:
May, 2017
File:
PDF, 591 KB
english, 2017