Susceptor Coating Materials Applicable for SiC Reactor...

Materials Science Forum 2017 / 5 Vol. 897

Susceptor Coating Materials Applicable for SiC Reactor Cleaning

Shioda, Kohei, Habuka, Hitoshi, Ito, Hideki, Mitani, Shin-Ichi, Takahashi, Yoshinao
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
897
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.897.99
Date:
May, 2017
File:
PDF, 2.01 MB
english, 2017
Conversion to is in progress
Conversion to is failed