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A novel mechanism of ultrathin SOI synthesis by extremely low-energy hot O + implantation
Hoshino, Yasushi, Yachida, Gosuke, Inoue, Kodai, Toyohara, Taiga, Nakata, JyojiVolume:
49
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/49/31/315106
Date:
August, 2016
File:
PDF, 3.32 MB
english, 2016