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Surface Protection of Low-Melting Glass Based Silicon Substrates for Silicon Transistor Fabrication
Ismailov, T. A., Sarkarov, T. É., Shangereeva, B. A., Shakhmaeva, A. R.Volume:
74
Language:
english
Journal:
Glass and Ceramics
DOI:
10.1007/s10717-017-9954-8
Date:
September, 2017
File:
PDF, 80 KB
english, 2017