3D Atomic Scale Analysis of CMOS type structures for 14 nm...

Microscopy and Microanalysis 2015 / 08 Vol. 21; Iss. S3

3D Atomic Scale Analysis of CMOS type structures for 14 nm UTBB-SOI technology

Estivill, Robert, Grenier, Adeline, Printemps, Tony, Juhel, Marc, Gregoire, Magali, Caubet, Pierre, Blavette, Didier
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Volume:
21
Language:
english
Journal:
Microscopy and Microanalysis
DOI:
10.1017/S1431927615003402
Date:
August, 2015
File:
PDF, 185 KB
english, 2015
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