Time-resolved two-dimensional profiles of electron density...

Scientific Reports 2017 / 12 Vol. 7; Iss. 1

Time-resolved two-dimensional profiles of electron density and temperature of laser-produced tin plasmas for extreme-ultraviolet lithography light sources

Tomita, Kentaro, Sato, Yuta, Tsukiyama, Syouichi, Eguchi, Toshiaki, Uchino, Kiichiro, Kouge, Kouichiro, Tomuro, Hiroaki, Yanagida, Tatsuya, Wada, Yasunori, Kunishima, Masahito, Soumagne, Georg, Kodama
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Volume:
7
Language:
english
Journal:
Scientific Reports
DOI:
10.1038/s41598-017-11685-0
Date:
December, 2017
File:
PDF, 6.75 MB
english, 2017
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