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The effect of monohydric and polyhydric alcohols on silicon anisotropic etching in KOH solutions
Zubel, Irena, Rola, Krzysztof P.Volume:
266
Language:
english
Journal:
Sensors and Actuators A: Physical
DOI:
10.1016/j.sna.2017.09.022
Date:
October, 2017
File:
PDF, 7.12 MB
english, 2017