Effect of oxidation temperature on physical and electrical...

Thin Solid Films 2017 / 11 Vol. 642

Effect of oxidation temperature on physical and electrical properties of ZrO 2 thin-film gate oxide on Ge substrate

Lei, Zhen Ce, Goh, Kian Heng, Zainal Abidin, Nor Ishida, Wong, Yew Hoong
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Volume:
642
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2017.10.008
Date:
November, 2017
File:
PDF, 1.85 MB
english, 2017
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