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AIP Conference Proceedings [AIP STRESS-INDUCED PHENOMENA IN METALLIZATION: 11th International Workshop - Bad Schandau, (Germany) (12–14 April 2010)] - Improved Interconnect Properties For Nano-Twinned Copper: Microstructure And Stability
Xu, Di, Chen, Hsin-Ping, Tu, K. N., Zschech, Ehrenfried, Ogawa, Shinichi, Ho, Paul S.Year:
2010
Language:
english
DOI:
10.1063/1.3527132
File:
PDF, 7.15 MB
english, 2010