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Accurate Measurement of Porous Low-k Thin-Films by Nanoindentation: Densification Scaling versus Substrate Effects
Lionti, K., Virwani, K., Volksen, W., King, R., Frommer, J., Dubois, G.Volume:
6
Year:
2017
Language:
english
Journal:
ECS Journal of Solid State Science and Technology
DOI:
10.1149/2.0151710jss
File:
PDF, 314 KB
english, 2017