Investigation of structural network and mechanical...

Journal of Alloys and Compounds 2017 / 10

Investigation of structural network and mechanical properties of Titanium silicon nitride (TiSiN) thin films

Guha, Spandan, Das, Soham, Bandyopadhyay, Asish, Das, Santanu, Swain, Bibhu P.
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Language:
english
Journal:
Journal of Alloys and Compounds
DOI:
10.1016/j.jallcom.2017.09.340
Date:
October, 2017
File:
PDF, 4.87 MB
english, 2017
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