Thickness-dependent surface morphology and crystallization...

Thin Solid Films 2017 / 11 Vol. 642

Thickness-dependent surface morphology and crystallization of HfO 2 coatings prepared with ion-assisted deposition

Zhang, Lei, Zhang, Jinlong, Jiao, Hongfei, Bao, Ganghua, Wang, Zhanshan, Cheng, Xinbin
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Volume:
642
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2017.10.010
Date:
November, 2017
File:
PDF, 1.03 MB
english, 2017
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