Transmission of oxygen radicals through free-standing single-layer and multilayer silicon-nitride and silicon-dioxide films
Choudhury, F. A., Nguyen, H. M., Sabat, G., Minkoff, B. B., Nishi, Y., Sussman, M. R., Shohet, J. L.Volume:
122
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.5000135
Date:
August, 2017
File:
PDF, 1.60 MB
english, 2017