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[ASME 2007 First International Conference on Integration and Commercialization of Micro and Nanosystems - Sanya, Hainan, China (January 10–13, 2007)] First International Conference on Integration and Commercialization of Micro and Nanosystems, Parts A and B - Several Key Technologies to Improve Silicon Microgyro Performance
Xia, Dunzhu, Zhou, Bailing, Wang, ShourongYear:
2007
Language:
english
DOI:
10.1115/mnc2007-21543
File:
PDF, 448 KB
english, 2007