Removal of Plasma-Induced Physical Damage Formed in...

NANO 2017 / 08 Vol. 12; Iss. 8

Removal of Plasma-Induced Physical Damage Formed in Nanoscale Three-Dimensional FinFETs

Yoon, Junho, Lee, Jeongyun, Yoo, Won Jong
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Volume:
12
Language:
english
Journal:
Nano
DOI:
10.1142/S1793292017500990
Date:
August, 2017
File:
PDF, 798 KB
english, 2017
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