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Anisotropic Co-Hf Thin Films for Micro-Sensors and Micro-Transducers
Madurga, V., Favieres, C., Vergara, J.Volume:
644
Language:
english
Journal:
Key Engineering Materials
DOI:
10.4028/www.scientific.net/KEM.644.65
Date:
May, 2015
File:
PDF, 1.41 MB
english, 2015