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Microsystem Technologies 2017 / 8

Calibration procedure for piezoelectric MEMS resonators to determine simultaneously density and viscosity of liquids

Toledo, J., Ruiz-Díez, V., Pfusterschmied, G., Schmid, U., Sánchez-Rojas, J. L.
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Language:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-017-3536-0
Date:
August, 2017
File:
PDF, 1.34 MB
english, 2017
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