Structural and compositional characterization of RF...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2017 / 11 Vol. 35; Iss. 6

Structural and compositional characterization of RF magnetron cosputtered lithium silicate films: From Li 2 Si 2 O 5 to lithium-rich Li 8 SiO 6

Coyle, Jaclyn, Apblett, Christopher, Brumbach, Michael, Ohlhausen, James, Stoldt, Conrad
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Volume:
35
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4998726
Date:
November, 2017
File:
PDF, 1.08 MB
english, 2017
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