Nano-Structures Stiction Suppression by Molecular Structure Optimized Surface Energy Reduction Agent
Koide, Tatsuhiko, Kimura, Shinsuke, Iimori, Hiroyasu, Sugita, Tomohiko, Sato, Katsuhiro, Kumon, Soichi, Terui, Yoshiharu, Okumura, Yuzo, Ogawa, YoshihiroVolume:
80
Language:
english
Journal:
ECS Transactions
DOI:
10.1149/08002.0053ecst
Date:
August, 2017
File:
PDF, 263 KB
english, 2017