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Sub-Micron Anisotropic InP-based III-V Semiconductor Material Deep Etching for On-Chip Laser Photonics Devices
Ng, Doris Keh-Ting, Lee, Chee Wei, Krishnamurthy, Vivek, Wang, QianLanguage:
english
Journal:
Advanced Engineering Materials
DOI:
10.1002/adem.201700465
Date:
September, 2017
File:
PDF, 2.61 MB
english, 2017