Low temperature one-step growth of AlON thin films with...

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ACS Applied Materials & Interfaces 2017 / 10

Low temperature one-step growth of AlON thin films with homogenous nitrogen doping profile by plasma enhanced atomic layer deposition

Chen, Hong-Yan, Lu, Hong-Liang, Chen, Jin-Xin, Zhang, Feng, Ji, Xin-Ming, Liu, Wen-Jun, Yang, Xiao-Feng, Zhang, David Wei
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Language:
english
Journal:
ACS Applied Materials & Interfaces
DOI:
10.1021/acsami.7b12262
Date:
October, 2017
File:
PDF, 1.81 MB
english, 2017
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