Atomic layer deposited oxide films as protective interface...

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Nanotechnology 2017 / 10

Atomic layer deposited oxide films as protective interface layers for integrated graphene transfer

Cabrero-Vilatela, Andrea, Alexander-Webber, Jack Allen, Sagade, Abhay, Aria, Adrianus Indrat, Braeuninger-Weimer, Philipp, Martin, Marie-Blandine, Weatherup, Robert, Hofmann, Stephan
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Language:
english
Journal:
Nanotechnology
DOI:
10.1088/1361-6528/aa940c
Date:
October, 2017
File:
PDF, 969 KB
english, 2017
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