Critical dimension variation caused by wrinkle in extreme...

Japanese Journal of Applied Physics 2017 / 10 Vol. 56; Iss. 10

Critical dimension variation caused by wrinkle in extreme ultra-violet pellicle for 3-nm node

Kim, Guk-Jin, Kim, In-Seon, Lee, Sung-Gyu, Yeung, Michael, Kim, Min-Su, Park, Jin-Goo, Oh, Hye-Keun
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Volume:
56
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.56.106501
Date:
October, 2017
File:
PDF, 3.49 MB
english, 2017
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