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Efficient thermal utilization in MEMS bulk micromachined pyroelectric infrared sensor using thermal oxide thin layer
Gaur, Surender P., Kumar, Prem, Rangra, Kamaljit, Kumar, DineshLanguage:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-017-3560-0
Date:
October, 2017
File:
PDF, 1.57 MB
english, 2017