In-process debris removal in femtosecond laser processing
Abe, Tetsuya, Hasegawa, Satoshi, Takahashi, Hidetomo, Ota, Michiharu, Hayasaki, YoshioVolume:
123
Language:
english
Journal:
Applied Physics A
DOI:
10.1007/s00339-017-1333-3
Date:
November, 2017
File:
PDF, 1.38 MB
english, 2017