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[AIP ION IMPLANTATION TECHNOLOGY: 16th International Conference on Ion Implantation Technology - IIT 2006 - Marseille (France) (11-16 June 2006)] AIP Conference Proceedings - Cross-sectional TEM Observations of Si Wafers Irradiated With Gas Cluster Ion Beams
Isogai, Hiromichi, Toyoda, Eiji, Senda, Takeshi, Izunome, Koji, Kashima, Kazuhiko, Toyoda, Noriaki, Yamada, IsaoVolume:
866
Year:
2006
DOI:
10.1063/1.2401493
File:
PDF, 581 KB
2006