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[AIP APPLICATION OF ACCELERATORS IN RESEARCH AND INDUSTRY: Twentieth International Conference - Fort Worth (Texas) (10–15 August 2008)] AIP Conference Proceedings - Precise Fabrication of Silicon Wafers Using Gas Cluster Ion Beams
Isogai, Hiromichi, Toyoda, Eiji, Izunome, Koji, Kashima, Kazuhiko, Mashita, Takafumi, Toyoda, Noriaki, Yamada, Isao, McDaniel, Floyd D., Doyle, Barney L.Year:
2009
DOI:
10.1063/1.3120051
File:
PDF, 958 KB
2009