Micro-fabrication method of graphite mesa microdevices based on optical lithography technology
Zhang, Cheng, Wen, Donghui, Zhu, Huamin, Yang, Xing, Shi, YunshengLanguage:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/1361-6439/aa8476
Date:
August, 2017
File:
PDF, 986 KB
english, 2017