CMOS MEMS Hot-Film Thermoelectronic Flow Sensor

IEEE Sensors Letters 2017 / 12 Vol. 1; Iss. 6

CMOS MEMS Hot-Film Thermoelectronic Flow Sensor

De Luca, Andrea, Udrea, Florin
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Volume:
1
Language:
english
Journal:
IEEE Sensors Letters
DOI:
10.1109/LSENS.2017.2757086
Date:
December, 2017
File:
PDF, 490 KB
english, 2017
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