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Electron microscopy studies of the intermediate layers at the SiO 2 /GaN interface
Mitsuishi, Kazutaka, Kimoto, Koji, Irokawa, Yoshihiro, Suzuki, Taku, Yuge, Kazuya, Nabatame, Toshihide, Takashima, Shinya, Ueno, Katsunori, Edo, Masaharu, Nakagawa, Kiyokazu, Koide, YasuoVolume:
56
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.56.110312
Date:
November, 2017
File:
PDF, 1000 KB
english, 2017