Magnetic films for electromagnetic actuation in MEMS switches
de Oliveira Hansen, Roana, Mátéfi-Tempfli, Mária, Safonovs, Romans, Adam, Jost, Chemnitz, Steffen, Reimer, Tim, Wagner, Bernhard, Benecke, Wolfgang, Mátéfi-Tempfli, StefanLanguage:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-017-3595-2
Date:
October, 2017
File:
PDF, 4.83 MB
english, 2017