Construction and characterization of a...

Construction and characterization of a frequency-controlled, picometer-resolution, displacement encoder-actuator

Koulakis, John P., Stein, Michael, Holczer, Károly
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Volume:
87
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.4950778
Date:
May, 2016
File:
PDF, 2.13 MB
english, 2016
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