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Improvement of the magnetron sputtered coating adhesion through pulsed bombardment by high-energy ions
Melnik, Yu A, Metel, A SVolume:
830
Language:
english
Journal:
Journal of Physics: Conference Series
DOI:
10.1088/1742-6596/830/1/012099
Date:
May, 2017
File:
PDF, 648 KB
english, 2017