Atom sieve for nanometer resolution neutral helium...

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 2017 / 11 Vol. 35; Iss. 6

Atom sieve for nanometer resolution neutral helium microscopy

Flatabø, Ranveig, Greve, Martin M., Eder, Sabrina D., Kalläne, Matthias, Palau, Adrià Salvador, Berggren, Karl K., Holst, Bodil
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Volume:
35
Language:
english
Journal:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
DOI:
10.1116/1.4994330
Date:
November, 2017
File:
PDF, 2.64 MB
english, 2017
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