Effects of implant spacer on InP-based self-aligned pseudomorphic SIGFETs
Chen, C.L., Mahoney, L.J., Calawa, S.D., Molvar, K.M.Volume:
35
Year:
1999
Language:
english
Journal:
Electronics Letters
DOI:
10.1049/el:19990380
File:
PDF, 421 KB
english, 1999